Type conductivity conversion in MOCVD CdxHg1-xTe/GaAs hetero-structures under ion milling

Ihor Izhnin; Victor Bogoboyashchyy; Anatoliy Kotkov; Alexsandr Moiseev; Natalya Grishnova

doi:10.1117/12.622113

29 September 2005 Type conductivity conversion in MOCVD Cd_xHg_1-xTe/GaAs hetero-structures under ion milling

Ihor Izhnin, Victor Bogoboyashchyy, Anatoliy Kotkov, Alexsandr Moiseev, Natalya Grishnova

Proceedings Volume 5957, Infrared Photoelectronics; 595716 (2005) https://doi.org/10.1117/12.622113
Event: Congress on Optics and Optoelectronics, 2005, Warsaw, Poland

Abstract

P-n conductivity type conversion under ion milling in MOCVD p-Cd_xHg_1-xTe/GaAs multi-layer hetero-structures is considered. It was revealed that CdTe (1 μm thick) passivation layer displayed the protective properties regarding ion milling action on active layer. P-n conversion at ion milling was observed in structures with 0.1-0.2 μm thick CdTe passivation layer; however, the converted depth (7 μm) was smaller than that in the similar homogeneous samples (15 μm). It was shown that the main properties of the converted p-n structures with thin CdTe layer were the same as in homogeneous samples. Ion milling resulted in forming of the typical n⁺- n - p⁺ structure with damaged n⁺-layer and main converted n-layer characterised by very low electron concentration. The relaxation of p-n structure electrical properties was also studied.

Citation Download Citation

Ihor Izhnin, Victor Bogoboyashchyy, Anatoliy Kotkov, Alexsandr Moiseev, and Natalya Grishnova "Type conductivity conversion in MOCVD Cd_xHg_1-xTe/GaAs hetero-structures under ion milling", Proc. SPIE 5957, Infrared Photoelectronics, 595716 (29 September 2005); https://doi.org/10.1117/12.622113

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available