Sliced multilayer gratings (SMG) based on Co/C multilayer coatings for the carbon window (4.4-5 nm)

E. A. Bugaev; R. M. Feschenko; A. V. Vinogradov; D. L. Vorornov; V. A. Tokarev; V. P. Petukhov

doi:10.1117/12.616841

10 September 2005 Sliced multilayer gratings (SMG) based on Co/C multilayer coatings for the carbon window (4.4-5 nm)

E. A. Bugaev, R. M. Feschenko, A. V. Vinogradov, D. L. Vorornov, V. A. Tokarev, V. P. Petukhov

Proceedings Volume 5918, Laser-Generated, Synchrotron, and Other Laboratory X-Ray and EUV Sources, Optics, and Applications II; 591817 (2005) https://doi.org/10.1117/12.616841
Event: Optics and Photonics 2005, 2005, San Diego, California, United States

Abstract

Two samples of the new type of X-ray spectral elements--sliced multilayer grating (SMG) for 4.4-5 nm interval based on Co/C multilayer coatings have been produced and tested. A novel experimental approach based on a flow proportional counter was introduced and used to measure diffraction efficiency of SMG gratings. Spectra of Al discharge plasma were obtained with one of the SMGs. The properties of the SMG gratings are discussed.

Citation Download Citation

E. A. Bugaev, R. M. Feschenko, A. V. Vinogradov, D. L. Vorornov, V. A. Tokarev, and V. P. Petukhov "Sliced multilayer gratings (SMG) based on Co/C multilayer coatings for the carbon window (4.4-5 nm)", Proc. SPIE 5918, Laser-Generated, Synchrotron, and Other Laboratory X-Ray and EUV Sources, Optics, and Applications II, 591817 (10 September 2005); https://doi.org/10.1117/12.616841

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