Paper
18 August 2005 Multi-purpose extrinsic Fabry-Perot sensor with miniature dual fiber configuration
Jung-Tsung Chou, Chiung-Huei Huang, Ching-Ming Yeh, Calvin C. Chang, Hung-Ming Tai
Author Affiliations +
Abstract
A miniature sensor based on extrinsic Fabry-Perot interferometry is proposed. In this setup, two optical fibers are integrated into a miniature sensing head to produce a pair of quadrature signals for solving direction ambiguity problem. It can also achieve nanometer resolution and at least 10kHz dynamic range after electronic subdivision. Comparing with capacitive senor, it has advantages including electromagnetic interference immunity and long distance measurement capability. In this paper, related theoretical descriptions are introduced and the comparisons with capacitive sensor are conducted. An experiment for detecting the characteristics of hard disk drive with this novel sensor is depicted. Furthermore, a new method of measuring liquid refractive index is described. All the experiment results show that this novel sensor is excellent in displacement and vibration measurement and many other applications.
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Jung-Tsung Chou, Chiung-Huei Huang, Ching-Ming Yeh, Calvin C. Chang, and Hung-Ming Tai "Multi-purpose extrinsic Fabry-Perot sensor with miniature dual fiber configuration", Proc. SPIE 5879, Recent Developments in Traceable Dimensional Measurements III, 58790K (18 August 2005); https://doi.org/10.1117/12.617991
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KEYWORDS
Sensors

Refractive index

Fabry–Perot interferometry

Fabry–Perot interferometers

Laser Doppler velocimetry

Liquids

Atomic force microscopy

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