Advances in interferometric surface metrology

Mike Conroy; Joe Armstrong; Ian Lee-Bennett

doi:10.1117/12.621576

18 August 2005 Advances in interferometric surface metrology

Mike Conroy, Joe Armstrong, Ian Lee-Bennett

Proceedings Volume 5872, Advancements in Polymer Optics Design, Fabrication, and Materials; 587208 (2005) https://doi.org/10.1117/12.621576
Event: Optics and Photonics 2005, 2005, San Diego, California, United States

Abstract

Optical interferometry is being used more and more to solve metrology problems. It is important in giving an insight into the properties of the top surface whether it is a processed surface or a thin film coating This paper will discuss metrology issues and ways in which to solve them using autocorrelation. Autocorrelation now commonly used to extract spatial information from surface profiles. It is suitable for looking at processing issues and identifying any periodic errors. An example showing the use of autocorrelation to solve process issues in diamond turning is shown.

Citation Download Citation

Mike Conroy, Joe Armstrong, and Ian Lee-Bennett "Advances in interferometric surface metrology", Proc. SPIE 5872, Advancements in Polymer Optics Design, Fabrication, and Materials, 587208 (18 August 2005); https://doi.org/10.1117/12.621576

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available