Fabrication of high efficiency compact 90° bend waveguide by using a dielectric 2D-PC structure

Tiziana Stomeo; Roberto Bergamo; Luigi Martiradonna; Roberto Cingolani; Massimo De Vittorio; Antonella D'Orazio; Valeria Marrocco

doi:10.1117/12.608376

7 July 2005 Fabrication of high efficiency compact 90° bend waveguide by using a dielectric 2D-PC structure

Tiziana Stomeo, Roberto Bergamo, Luigi Martiradonna, Roberto Cingolani, Massimo De Vittorio, Antonella D'Orazio, Valeria Marrocco

Author Affiliations +

Proceedings Volume 5840, Photonic Materials, Devices, and Applications; (2005) https://doi.org/10.1117/12.608376
Event: Microtechnologies for the New Millennium 2005, 2005, Sevilla, Spain

Abstract

In this paper we propose the design and the fabrication of 90° bend ridge waveguide (WG) assisted by a two-dimensional photonic crystal (2D-PC). 2D-PCs act as efficient mirrors along the boundaries of the bend ridge thus reducing the in-plane losses. The ridge waveguide consists of a 3 μm x 0.75 μm titanium dioxide core on a silica bottom cladding. The 2D-PC structure surrounding the bend waveguide is composed of a triangular array of circular dielectric pillars having a height of 0.75 μm. The titanium dioxide waveguiding core layer is covered with PMMA in order to create a quasi-symmetric structure. A photonic band gap centered around 1.3 μm is obtained by a PC radius r = 0.33a and lattice period a = 0.450 μm. The design of the whole structure is subsequently optimized by using a 3D Finite Difference Time Domain based computer code. The ridge waveguide assisted by a 2D-PC has been fabricated by using electron beam lithography and reactive ion etching. For the pattern transfer we have used about 50 nm thin layer Cr metal etch mask obtained by means of a lift-off technique based on the use of bi-layer resist (PMMA/MMA). The presence of the 2D-PC around the bend waveguide leads to a sharp increase of the transmission efficiency around 1.3 μm for curvature radius of 2.5 μm. The bend transmission results to be in the range between 0.76 and 0.85 when the thickness of the ridge WG and of the 2D-PC pillars is between 0.75 and 1.3 μm. This value is more than twice with respect to the bend waveguide without 2D-PC.

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Tiziana Stomeo, Roberto Bergamo, Luigi Martiradonna, Roberto Cingolani, Massimo De Vittorio, Antonella D'Orazio, and Valeria Marrocco "Fabrication of high efficiency compact 90° bend waveguide by using a dielectric 2D-PC structure", Proc. SPIE 5840, Photonic Materials, Devices, and Applications, (7 July 2005); https://doi.org/10.1117/12.608376

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KEYWORDS

Waveguides

Dielectrics

Titanium dioxide

Alternate lighting of surfaces

Cladding

Mirrors

Photonic crystals

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