Large-signal model of a resonating cantilever-based transducer for system level electrical simulation

Jaume Verd; Jordi Teva; Gabriel Abadal; Francesc Perez-Murano; Jaume Esteve; Nuria Barniol

doi:10.1117/12.608462

1 July 2005 Large-signal model of a resonating cantilever-based transducer for system level electrical simulation

Jaume Verd, Jordi Teva, Gabriel Abadal, Francesc Perez-Murano, Jaume Esteve, Nuria Barniol

Proceedings Volume 5836, Smart Sensors, Actuators, and MEMS II; (2005) https://doi.org/10.1117/12.608462
Event: Microtechnologies for the New Millennium 2005, 2005, Sevilla, Spain

Abstract

In this work, we present a non-linear electromechanical model of an electrostatically excited cantilever that can be used to perform system level electrical simulations. This model is implemented by using an analog hardware description language (VHDL-AMS) that allows its use in a common IC CAD environment like CADENCE. Small-signal and large-signal simulations are performed and the results are compared with a simple linear model (RLC//C) showing the benefits of this model. This model is validated by its fit with the experimental results obtained from a monolithic sub-micrometer cantilever based sensor

Citation Download Citation

Jaume Verd, Jordi Teva, Gabriel Abadal, Francesc Perez-Murano, Jaume Esteve, and Nuria Barniol "Large-signal model of a resonating cantilever-based transducer for system level electrical simulation", Proc. SPIE 5836, Smart Sensors, Actuators, and MEMS II, (1 July 2005); https://doi.org/10.1117/12.608462

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