Accurate and highly resolving quadri-wave lateral shearing interferometer, from visible to IR

Sabrina Velghe; Jerome Primot; Nicolas Guerineau; Riad Haidar; Mathieu Cohen; Benoit Wattellier

doi:10.1117/12.611606

14 February 2005 Accurate and highly resolving quadri-wave lateral shearing interferometer, from visible to IR

Sabrina Velghe, Jerome Primot, Nicolas Guerineau, Riad Haidar, Mathieu Cohen, Benoit Wattellier

Proceedings Volume 5776, Eighth International Symposium on Laser Metrology; (2005) https://doi.org/10.1117/12.611606
Event: Eighth International Conference on Laser Metrology, 2005, Merida, Mexico

Abstract

A powerful and achromatic interferometric technique based on recent advances in the technology of non-diffracting arrays is used to evaluate wave-front distortions with a high transverse resolution and an easily tunable dynamic range. The device presented here belongs to the family of Multiple Wave Lateral Shearing Interferometers (MWLSI) and has the natural capability to measure simultaneously four wave-front derivatives. In this communication, we propose to exploit all the information de facto included in the interferogram; in this perspective we suggest a new method of reconstruction of the wave-front knowing its derivatives. We will show that our device is already successful in the field of laser metrology in the near infrared domain and that it is promising for the far infrared domain with the presentation of a prototype dedicated to measurements at 10.6µm.

Citation Download Citation

Sabrina Velghe, Jerome Primot, Nicolas Guerineau, Riad Haidar, Mathieu Cohen, and Benoit Wattellier "Accurate and highly resolving quadri-wave lateral shearing interferometer, from visible to IR", Proc. SPIE 5776, Eighth International Symposium on Laser Metrology, (14 February 2005); https://doi.org/10.1117/12.611606

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