Post-treating techniques of porous silicon thin flm

Ziqiang Zhu; Yongfu Long; Shaoqiang Chen; Xianwen Yu; Jianzhong Zhu

doi:10.1117/12.608166

8 December 2004 Post-treating techniques of porous silicon thin film

Ziqiang Zhu, Yongfu Long, Shaoqiang Chen, Xianwen Yu, Jianzhong Zhu

Proceedings Volume 5774, Fifth International Conference on Thin Film Physics and Applications; (2004) https://doi.org/10.1117/12.608166
Event: Fifth International Conference on Thin Film Physics and Applications, 2004, Shanghai, China

Abstract

An effective and simple novel technique for post-treating of PS films has been developed. The post treatment technique can avoid the cracking of PS films and enhance the stability, the surface smoothness and the mechanical intensity of the PS films, resulting in the expansion of application of the PS films.

Citation Download Citation

Ziqiang Zhu, Yongfu Long, Shaoqiang Chen, Xianwen Yu, and Jianzhong Zhu "Post-treating techniques of porous silicon thin film", Proc. SPIE 5774, Fifth International Conference on Thin Film Physics and Applications, (8 December 2004); https://doi.org/10.1117/12.608166

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