PROCEEDINGS VOLUME 5756
MICROLITHOGRAPHY 2005 | 27 FEBRUARY - 4 MARCH 2005
Design and Process Integration for Microelectronic Manufacturing III
Editor(s): Lars W. Liebmann
Editor Affiliations +
IN THIS VOLUME

7 Sessions, 43 Papers, 0 Presentations, 0 Posters
DfM Overview  (3)
OPC and RET  (6)
MICROLITHOGRAPHY 2005
27 February - 4 March 2005
San Jose, California, United States
DfM Overview
Lars Liebmann, Dan Maynard, Kevin McCullen, Nakgeuon Seong, Ed Buturla, Mark Lavin, Jason Hibbeler
Proceedings Volume Design and Process Integration for Microelectronic Manufacturing III, (2005) https://doi.org/10.1117/12.604723
Marc Levitt
Proceedings Volume Design and Process Integration for Microelectronic Manufacturing III, (2005) https://doi.org/10.1117/12.601945
James Hogan, Christopher Progler, Ahmad Chatila, Bert Bruggeman, Mitchell Heins, Robert Pack, Victor Boksha
Proceedings Volume Design and Process Integration for Microelectronic Manufacturing III, (2005) https://doi.org/10.1117/12.603077
Design, Automation, and Characterization
J. A. Torres, C. N. Berglund
Proceedings Volume Design and Process Integration for Microelectronic Manufacturing III, (2005) https://doi.org/10.1117/12.599044
Mary Jane Brodsky, Scott Halle, Vickie Jophlin-Gut, Lars Liebmann, Don Samuels, Gary Crispo, Kourosh Nafisi, Vijay Ramani, Ingrid Peterson
Proceedings Volume Design and Process Integration for Microelectronic Manufacturing III, (2005) https://doi.org/10.1117/12.599865
William Howard, Jaione Tirapu Azpiroz, Yalin Xiong, Chris Mack, Gaurav Verma, William Volk, Harold Lehon, Yunfei Deng, Rui-fang Shi, et al.
Proceedings Volume Design and Process Integration for Microelectronic Manufacturing III, (2005) https://doi.org/10.1117/12.604698
Tadashi Kitamura, Kazufumi Kubota, Toshiaki Hasebe, Futoshi Sakai, Shinichi Nakazawa, Neeti Vohra, Masahiro Yamamoto, Masahiro Inoue
Proceedings Volume Design and Process Integration for Microelectronic Manufacturing III, (2005) https://doi.org/10.1117/12.599467
Design Optimization and RET
Proceedings Volume Design and Process Integration for Microelectronic Manufacturing III, (2005) https://doi.org/10.1117/12.601105
Proceedings Volume Design and Process Integration for Microelectronic Manufacturing III, (2005) https://doi.org/10.1117/12.605371
Lei He, Andrew B. Kahng, King Ho Tam, Jinjun Xiong
Proceedings Volume Design and Process Integration for Microelectronic Manufacturing III, (2005) https://doi.org/10.1117/12.605222
Proceedings Volume Design and Process Integration for Microelectronic Manufacturing III, (2005) https://doi.org/10.1117/12.600862
Puneet Gupta, Andrew B. Kahng, Chul-Hong Park
Proceedings Volume Design and Process Integration for Microelectronic Manufacturing III, (2005) https://doi.org/10.1117/12.604872
Nishrin Kachwala, Walter Iandolo, Travis Brist, Rick Farnbach
Proceedings Volume Design and Process Integration for Microelectronic Manufacturing III, (2005) https://doi.org/10.1117/12.602539
Analysis and Modeling
Proceedings Volume Design and Process Integration for Microelectronic Manufacturing III, (2005) https://doi.org/10.1117/12.595062
Proceedings Volume Design and Process Integration for Microelectronic Manufacturing III, (2005) https://doi.org/10.1117/12.601842
Amir Borna, Chris Progler, David Blaauw
Proceedings Volume Design and Process Integration for Microelectronic Manufacturing III, (2005) https://doi.org/10.1117/12.604606
Paul Friedberg, Yu Cao, Jason Cain, Ruth Wang, Jan Rabaey, Costas Spanos
Proceedings Volume Design and Process Integration for Microelectronic Manufacturing III, (2005) https://doi.org/10.1117/12.600028
Proceedings Volume Design and Process Integration for Microelectronic Manufacturing III, (2005) https://doi.org/10.1117/12.604567
James A. Bruce, Edward W. Conrad, Gregory J. Dick, D. John Nickel, Jacek G. Smolinski
Proceedings Volume Design and Process Integration for Microelectronic Manufacturing III, (2005) https://doi.org/10.1117/12.600552
Design for Yield
John Gookassian, Bob Pack, Mitch Heins, John Garcia, Hitendra Divecha, Brian Gordon, Dean Frazier, Dan White, Gurgen Lachinyan, et al.
Proceedings Volume Design and Process Integration for Microelectronic Manufacturing III, (2005) https://doi.org/10.1117/12.600261
Proceedings Volume Design and Process Integration for Microelectronic Manufacturing III, (2005) https://doi.org/10.1117/12.601132
Proceedings Volume Design and Process Integration for Microelectronic Manufacturing III, (2005) https://doi.org/10.1117/12.605369
Proceedings Volume Design and Process Integration for Microelectronic Manufacturing III, (2005) https://doi.org/10.1117/12.598063
Proceedings Volume Design and Process Integration for Microelectronic Manufacturing III, (2005) https://doi.org/10.1117/12.601062
OPC and RET
Chun-Chi Yu, Ming-Feng Shieh, Erick Liu, Benjamin Lin, Henry Lin, Manoj Chacko, Xiaoyang Li, Wen-Kang Lei, Jonathan Ho, et al.
Proceedings Volume Design and Process Integration for Microelectronic Manufacturing III, (2005) https://doi.org/10.1117/12.598838
Scott Jessen, Mark Mason, Sean O'Brien, Mark Terry, Robert Soper, Thomas Wolf
Proceedings Volume Design and Process Integration for Microelectronic Manufacturing III, (2005) https://doi.org/10.1117/12.600005
Proceedings Volume Design and Process Integration for Microelectronic Manufacturing III, (2005) https://doi.org/10.1117/12.600636
Proceedings Volume Design and Process Integration for Microelectronic Manufacturing III, (2005) https://doi.org/10.1117/12.601166
Ji-Suk Hong, Dong-Hyun Kim, Sang-Wook Kim, Moon-Hyun Yoo, Jeong-Taek Kong
Proceedings Volume Design and Process Integration for Microelectronic Manufacturing III, (2005) https://doi.org/10.1117/12.600231
Yuan Zhang, Rick Gray, Seurien Chou, Barry Rockwell, Guangming Xiao, Henry Kamberian, Rand Cottle, Alex Wolleben, Chris Progler
Proceedings Volume Design and Process Integration for Microelectronic Manufacturing III, (2005) https://doi.org/10.1117/12.598884
Poster Session
Young Mog Ham, Brian Dillon, Chris Progler, Kory Goldammer, Zhiziang Jin, Gary Green, R. Scott Mackay, Hitendra Divecha, Victor Boksha, et al.
Proceedings Volume Design and Process Integration for Microelectronic Manufacturing III, (2005) https://doi.org/10.1117/12.600730
Proceedings Volume Design and Process Integration for Microelectronic Manufacturing III, (2005) https://doi.org/10.1117/12.600180
Proceedings Volume Design and Process Integration for Microelectronic Manufacturing III, (2005) https://doi.org/10.1117/12.599648
Proceedings Volume Design and Process Integration for Microelectronic Manufacturing III, (2005) https://doi.org/10.1117/12.600659
Xin Wang, Mark Pillof, Hongbo Tang, Clive Wu
Proceedings Volume Design and Process Integration for Microelectronic Manufacturing III, (2005) https://doi.org/10.1117/12.599830
Song Li, Ting Chen, Santosh Shah, Ketan Joshi, Kalyan Thumaty, Narain Arora
Proceedings Volume Design and Process Integration for Microelectronic Manufacturing III, (2005) https://doi.org/10.1117/12.601421
Proceedings Volume Design and Process Integration for Microelectronic Manufacturing III, (2005) https://doi.org/10.1117/12.600887
Michel Cote, Alexander Miloslavsky, Philippe Hurat, Michael L. Rieger, Denis Goinard
Proceedings Volume Design and Process Integration for Microelectronic Manufacturing III, (2005) https://doi.org/10.1117/12.600086
Vincent Yongsheng Shu, Byoung Il Choi, Shyue-Fong Quek
Proceedings Volume Design and Process Integration for Microelectronic Manufacturing III, (2005) https://doi.org/10.1117/12.599253
Amos Dor, Yoram Schwarz
Proceedings Volume Design and Process Integration for Microelectronic Manufacturing III, (2005) https://doi.org/10.1117/12.584775
Chi-Yuan Hung, Gensheng Gao, Steven Zhang, Ze-Xi Deng, Christopher Cork, Lawrence S. Melvin III, Yan Jiang
Proceedings Volume Design and Process Integration for Microelectronic Manufacturing III, (2005) https://doi.org/10.1117/12.604526
Valery Axelrad, Andrei Shibkov, Gene Hill, Hung-Jen Lin, Cyrus Tabery, Dan White, Victor Boksha, Randy Thilmany
Proceedings Volume Design and Process Integration for Microelectronic Manufacturing III, (2005) https://doi.org/10.1117/12.600283
Proceedings Volume Design and Process Integration for Microelectronic Manufacturing III, (2005) https://doi.org/10.1117/12.598059
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