Reduction of edge defocus by modification of chuck shape on Nikon scanner S204B

Ying-Ku Lin; Chung-Chi Lin; Michael Tseng; Chih Chung Huang

doi:10.1117/12.598097

17 May 2005 Reduction of edge defocus by modification of chuck shape on Nikon scanner S204B

Ying-Ku Lin, Chung-Chi Lin, Michael Tseng, Chih Chung Huang

Proceedings Volume 5755, Data Analysis and Modeling for Process Control II; (2005) https://doi.org/10.1117/12.598097
Event: Microlithography 2005, 2005, San Jose, California, United States

Abstract

Edge defocus can be reduced by several techniques on a Nikon S204 scanner. By using main software MCSV version 3.44 or above, as well as disable range, and scan direction. Edge defocus can be reduced but is not eliminated at 3 o'clock and 4 o'clock. Wafer flatness is studied to investigate the cause of this defocus. The chuck shape is the key to avoid to defocusing at these two positions. Modification of chuck shape can reduce yield loss.

Citation Download Citation

Ying-Ku Lin, Chung-Chi Lin, Michael Tseng, and Chih Chung Huang "Reduction of edge defocus by modification of chuck shape on Nikon scanner S204B", Proc. SPIE 5755, Data Analysis and Modeling for Process Control II, (17 May 2005); https://doi.org/10.1117/12.598097

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