Full spectral analysis of line width roughness

L. H. A. Leunissen; G. F. Lorusso; M. Ercken; J. A. Croon; H. Yang; A. Azordegan; T. DiBiase

doi:10.1117/12.600185

10 May 2005 Full spectral analysis of line width roughness

L. H. A. Leunissen, G. F. Lorusso, M. Ercken, J. A. Croon, H. Yang, A. Azordegan, T. DiBiase

Proceedings Volume 5752, Metrology, Inspection, and Process Control for Microlithography XIX; (2005) https://doi.org/10.1117/12.600185
Event: Microlithography 2005, 2005, San Jose, California, United States

Abstract

Various approaches can be used to quantify line width roughness (LWR). One of the most commonly used estimators of LWR is the standard deviation. However, this approach is incomplete and ignores a substantial amount of information. We propose here a full spectral analysis to investigate and monitor LWR. A variety of estimators, such as standard deviation, peak-to-valley, average, correlation length and Fourier analysis have been implemented on-line on CDSEM. The algorithms were successfully tested against e-beam written LWR patterns, both deterministic and random. This approach allows a fully automated investigation of LWR. This methodology was used to monitor LWR over a long period of time, benchmark new resists and to investigate the effect of LWR on device performance and yield.

Citation Download Citation

L. H. A. Leunissen, G. F. Lorusso, M. Ercken, J. A. Croon, H. Yang, A. Azordegan, and T. DiBiase "Full spectral analysis of line width roughness", Proc. SPIE 5752, Metrology, Inspection, and Process Control for Microlithography XIX, (10 May 2005); https://doi.org/10.1117/12.600185

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available