Magnetic field ion mitigation for EUV light sources

Hiroshi Komori; Yousuke Imai; Georg Soumagne; Tamotsu Abe; Takashi Suganuma; Akira Endo

doi:10.1117/12.600360

6 May 2005 Magnetic field ion mitigation for EUV light sources

Hiroshi Komori, Yousuke Imai, Georg Soumagne, Tamotsu Abe, Takashi Suganuma, Akira Endo

Proceedings Volume 5751, Emerging Lithographic Technologies IX; (2005) https://doi.org/10.1117/12.600360
Event: Microlithography 2005, 2005, San Jose, California, United States

Abstract

Fast ions from laser-produced EUV plasma are expected to significantly damage the collector mirror, which is located near the plasma in a EUV light source. Ion sputtering of the multilayer structure may be the main damage mechanism but layer boundary mixing and surface roughness increase are also observed from a Xe plasma exposure experiment. The magnetic field ion mitigation technology was evaluated in order to extend the collector mirror lifetime. A coil pair that produces a maximum static magnetic field of 0.6 T on the coil axis was used for magnetic confinement of ions. Liquid Xe jets of 10 to 30 micron mater in diameter were used as a plasma target. Spatial distributions and energy distributions of ions were measured with Faraday cups and time-of-flight measurements respectively. The effectiveness of the magnetic field ion mitigation was evaluated by measuring the erosion rate with a quartz crystal microbalance. A significant decrease of the Faraday cup signal was monitored by applying a magnetic field of 0.6 T. Though target size dependence on magnetic field effectiveness was observed, measured erosion rate was reduced to less than 10% by applying 0.6-T magnetic field in the case of 10-micron mater Xe jet and 300-mJ Nd:YAG laser irradiation.

Citation Download Citation

Hiroshi Komori, Yousuke Imai, Georg Soumagne, Tamotsu Abe, Takashi Suganuma, and Akira Endo "Magnetic field ion mitigation for EUV light sources", Proc. SPIE 5751, Emerging Lithographic Technologies IX, (6 May 2005); https://doi.org/10.1117/12.600360

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