Paper
13 April 2005 Characterization of simple cubic 3D photonic crystals with complete photonic bandgaps
Sven Matthias, Frank Mueller, Ulrich M. Goesele
Author Affiliations +
Abstract
The major challenge in todays photonic crystal fabrication is the experimental realization of perfect, disorder-free structures. Macroporous silicon etching is a versatile technique for the manufacturing of large-scale well-ordered porous materials and three-dimensional photonic crystals. We investigate the degree of local disorder by scanning electron microscopy and a subsequent image processing, as well as the homogeneity of our large area crystals by an optical two-dimensional mapping. The observed disorder is related to the applied fabrication parameters. The deduced dependencies help to avoid disorder and to optimize our structures.
© (2005) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Sven Matthias, Frank Mueller, and Ulrich M. Goesele "Characterization of simple cubic 3D photonic crystals with complete photonic bandgaps", Proc. SPIE 5733, Photonic Crystal Materials and Devices III, (13 April 2005); https://doi.org/10.1117/12.590591
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CITATIONS
Cited by 2 scholarly publications.
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KEYWORDS
Modulation

Photonic crystals

Etching

Silicon

3D image processing

Semiconducting wafers

Scanning electron microscopy

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