Optimized capacitive MEMS microphone for photoacoustic spectroscopy (PAS) applications

Michael Pedersen; John McClelland

doi:10.1117/12.597136

25 March 2005 Optimized capacitive MEMS microphone for photoacoustic spectroscopy (PAS) applications

Michael Pedersen, John McClelland

Proceedings Volume 5732, Quantum Sensing and Nanophotonic Devices II; (2005) https://doi.org/10.1117/12.597136
Event: Integrated Optoelectronic Devices 2005, 2005, San Jose, California, United States

Abstract

The design of a miniature capacitive microphone is discussed with specific application to photoacoustic instrumentation. It is demonstrated that a microphone design optimized for use in PAS can provide significant improvements in performance, with positive implications on the overall system performance. Furthermore, it is shown that MEMS-based microphone technology allows for important improvements in microphone vibration sensitivity, size, cost and ruggedness with direct application to portable PAS systems.

Citation Download Citation

Michael Pedersen and John McClelland "Optimized capacitive MEMS microphone for photoacoustic spectroscopy (PAS) applications", Proc. SPIE 5732, Quantum Sensing and Nanophotonic Devices II, (25 March 2005); https://doi.org/10.1117/12.597136

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