Ultra-broadband THz field detection by ion-implanted III-V PC antenna

Ci-Ling Pan

doi:10.1117/12.596668

13 April 2005 Ultra-broadband THz field detection by ion-implanted III-V PC antenna (Invited Paper)

Ci-Ling Pan

Proceedings Volume 5725, Ultrafast Phenomena in Semiconductors and Nanostructure Materials IX; (2005) https://doi.org/10.1117/12.596668
Event: Integrated Optoelectronic Devices 2005, 2005, San Jose, California, United States

Abstract

The photoconductive (PC) antenna fabricated on arsenic-ion-implanted GaAs (GaAs:As⁺) and proton-bombarded InP (InP:H⁺) substrates are shown to have a useful detection bandwidths beyond 30 THz. This is comparable to that of the reference LT-GaAs PC antenna. The signal-to-noise ratio of these ion-implanted III-V PC antennas are, however, worse than that of the LT-GaAs devices because of the higher stray currents of the former under illumination. Ion-implanted III-V PC antennas are nevertheless attractive because the implanters are widely available, process parameters well-established and compatible with the IC industry. Implantations in selective areas are also straight forward. Our results suggest that ion-implanted III-V material can be a good choice as substrate or THz PC antennas, if the resistivity is increased by a proper annealing process and/or optimizing the implantation recipe.

Citation Download Citation

Ci-Ling Pan "Ultra-broadband THz field detection by ion-implanted III-V PC antenna (Invited Paper)", Proc. SPIE 5725, Ultrafast Phenomena in Semiconductors and Nanostructure Materials IX, (13 April 2005); https://doi.org/10.1117/12.596668

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