Paper
22 January 2005 Microfabrication of a multichannel microfluidic system for use with microbead reagent sources and detectors
Author Affiliations +
Abstract
This paper presents the design, fabrication, and testing of a multi-channel microfluidic system specifically designed for use with porous microbeads that can serve as both reagent sources and detectors. The system contains anisotropically etched reservoirs in which reagent source and detector beads are located, and microchannels that are fabricated on both side of the wafer to connect the each reservoir. Fluids are transported from reagent source bead reservoirs to "downstream" reservoirs containing detector beads. The system employs airflow channels to control liquid flow. Finally, the system is completed with PDMS covers on the top and bottom of the device to seal the channels. We have tested the complete system with sample fluid, showing control of liquid flow using the air channels. The result indicates that this system may be useful in biochemical applications where both reagent sources and receptor sites are combined.
© (2005) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jun Wan Kim, Young-Soo Sohn, and Dean P. Neikirk "Microfabrication of a multichannel microfluidic system for use with microbead reagent sources and detectors", Proc. SPIE 5718, Microfluidics, BioMEMS, and Medical Microsystems III, (22 January 2005); https://doi.org/10.1117/12.591251
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KEYWORDS
Microfluidics

Sensors

Control systems

Semiconducting wafers

Liquids

Microfabrication

Prototyping

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