Large silicon micromirror modeling and fabrication

Alexandre Marchese; Henri Camon; Christian Ganibal

doi:10.1117/12.590270

22 January 2005 Large silicon micromirror modeling and fabrication

Alexandre Marchese, Henri Camon, Christian Ganibal

Proceedings Volume 5717, MEMS/MOEMS Components and Their Applications II; (2005) https://doi.org/10.1117/12.590270
Event: MOEMS-MEMS Micro and Nanofabrication, 2005, San Jose, California, United States

Abstract

Electrostatic micromirrors are yet a well-known topic in the world of MOEMS. But in some specific cases, the mirror dimensions should have to be extended in order to be able to switch beams of a larger diameter. In other words, the convergence in dimensions between electronic technologies and classical machining in the range of hundreds microns to millimetre was not yet explored. This is the context of our study, whose goal is to make digital switching devices with a size of some millimetres and a large, pre-fixed deflection angle of ten degrees.

Citation Download Citation

Alexandre Marchese, Henri Camon, and Christian Ganibal "Large silicon micromirror modeling and fabrication", Proc. SPIE 5717, MEMS/MOEMS Components and Their Applications II, (22 January 2005); https://doi.org/10.1117/12.590270

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available