Electrostatic microrelays with adjustable parameters

Nikolay Ivanovich Mukhurov; Georgiy Ignatievich Efremov

doi:10.1117/12.591441

22 January 2005 Electrostatic microrelays with adjustable parameters

Nikolay Ivanovich Mukhurov, Georgiy Ignatievich Efremov

Proceedings Volume 5717, MEMS/MOEMS Components and Their Applications II; (2005) https://doi.org/10.1117/12.591441
Event: MOEMS-MEMS Micro and Nanofabrication, 2005, San Jose, California, United States

Abstract

Basic layout of micro-relays based on electrostatic operation principle with adjustable parameters (ESRA) for flat-parallel electrodes placement is characterised by that the anchor with immovable electrode is connected with base substrate by elastic holders and is fixed on a reversing electro-mechanical micro-drive. The ledges are formed in the elastic holders in an appointed place and at a designed height, on which the contacts of controlling circuit are placed. Due to elastic bond of the anchor, the micro-drive enable to change gradually inter-electrodes distance t providing stepless Uon adjustment in the 0.03 to 2.80 range of nominal operation voltage. Simultaneously, the t_c increases or decreases proportionally maintaining the appointed value of ΔU gradient of U_on and U_off voltages. In practice, the minimum ΔU value could be close to zero. Hence, the ESRA of the same typical size could operate in electric circuits under various fixed U_on values. Its usage is particularly effective in layouts providing non-stationary processes control (for instance, variation of temperature or effort in accordance with appointed program) owing to corresponding set of necessary inter-electrodes distance using the micro-drive.

Citation Download Citation

Nikolay Ivanovich Mukhurov and Georgiy Ignatievich Efremov "Electrostatic microrelays with adjustable parameters", Proc. SPIE 5717, MEMS/MOEMS Components and Their Applications II, (22 January 2005); https://doi.org/10.1117/12.591441

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