Benzocyclobutene (BCB)-based spiral inductor for wireless application

Kee-Keun Lee; Bruce C. Kim

doi:10.1117/12.583027

22 January 2005 Benzocyclobutene (BCB)-based spiral inductor for wireless application

Kee-Keun Lee, Bruce C. Kim

Proceedings Volume 5717, MEMS/MOEMS Components and Their Applications II; (2005) https://doi.org/10.1117/12.583027
Event: MOEMS-MEMS Micro and Nanofabrication, 2005, San Jose, California, United States

Abstract

This paper describes new type of MEMS spiral inductor using benzocyclobutene (BCB) for wireless applications. BCB consists of several attractive features for on-chip RF inductors, i.e., high resistivity, low dielectric constant and lower curing temperature. The fabricated inductor coils had 2.5 turns with 20μm for width, 20μm for pitch and the thickness of 2μm. The inductor coils are suspended about 12μm from the bottom BCB substrate. Our measured quality factor was 19 at 3.1GHz frequency. The measured inductance was approximately 3nH and it remained constant up to 10 GHz. The self resonant frequency (SRF) was at 13.6GHz.

Citation Download Citation

Kee-Keun Lee and Bruce C. Kim "Benzocyclobutene (BCB)-based spiral inductor for wireless application", Proc. SPIE 5717, MEMS/MOEMS Components and Their Applications II, (22 January 2005); https://doi.org/10.1117/12.583027

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