Design and fabrication of giant micromirrors using electroplating-based technology

Samir Ilias; Patrice A. Topart; Carl Larouche; Sebastien Leclair; Hubert Jerominek

doi:10.1117/12.591787

22 January 2005 Design and fabrication of giant micromirrors using electroplating-based technology

Samir Ilias, Patrice A. Topart, Carl Larouche, Sebastien Leclair, Hubert Jerominek

Proceedings Volume 5715, Micromachining and Microfabrication Process Technology X; (2005) https://doi.org/10.1117/12.591787
Event: MOEMS-MEMS Micro and Nanofabrication, 2005, San Jose, California, United States

Abstract

Giant micromirrors with large scanning deflection and good flatness are required for many space and terrestrial applications. A novel approach to manufacturing this category of micromirrors is proposed. The approach combines selective electroplating and flip-chip based technologies. It allows for large air gaps, flat and smooth active micromirror surfaces and permits independent fabrication of the micromirrors and control electronics, avoiding temperature and sacrificial layer incompatibilities between them. In this work, electrostatically actuated piston and torsion micromirrors were designed and simulated. The simulated structures were designed to allow large deflection, i.e. piston displacement larger than 10 um and torsional deflection up to 35°. To achieve large micromirror deflections, up to seventy micron-thick resists were used as a micromold for nickel and solder electroplating. Smooth micromirror surfaces (roughness lower than 5 nm rms) and large radius of curvature (R as large as 23 cm for a typical 1000x1000 um² micromirror fabricated without address circuits) were achieved. A detailed fabrication process is presented. First piston mirror prototypes were fabricated and a preliminary evaluation of static deflection of a piston mirror is presented.

Citation Download Citation

Samir Ilias, Patrice A. Topart, Carl Larouche, Sebastien Leclair, and Hubert Jerominek "Design and fabrication of giant micromirrors using electroplating-based technology", Proc. SPIE 5715, Micromachining and Microfabrication Process Technology X, (22 January 2005); https://doi.org/10.1117/12.591787

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