Laser micromachining techniques for industrial MEMS applications

Heather J. Booth; Charles E. Abbott; Ric M. Allott; Karl L. Boehlen; Jim Fieret; Jako Greuters; Paul Trimble; James Pedder

doi:10.1117/12.599414

12 April 2005 Laser micromachining techniques for industrial MEMS applications

Heather J. Booth, Charles E. Abbott, Ric M. Allott, Karl L. Boehlen, Jim Fieret, Jako Greuters, Paul Trimble, James Pedder

Author Affiliations +

Proceedings Volume 5713, Photon Processing in Microelectronics and Photonics IV; (2005) https://doi.org/10.1117/12.599414
Event: Lasers and Applications in Science and Engineering, 2005, San Jose, California, United States

Abstract

Pulsed laser sources are widely used for the micro-processing of materials from the structuring and patterning of surfaces to the direct machining of devices. This paper discusses laser micro-processing techniques for the fabrication of microstructures with high accuracy and precision. Techniques discussed include laser mask projection techniques and direct beam micromachining using galvo-scanners and high precision motion stages, with a variety of different lasers. Examples of the application of these techniques to the manufacture of MEMS and MOEMS devices are discussed.

Citation Download Citation

Heather J. Booth, Charles E. Abbott, Ric M. Allott, Karl L. Boehlen, Jim Fieret, Jako Greuters, Paul Trimble, and James Pedder "Laser micromachining techniques for industrial MEMS applications", Proc. SPIE 5713, Photon Processing in Microelectronics and Photonics IV, (12 April 2005); https://doi.org/10.1117/12.599414

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