Paper
21 February 1986 Aspheric Figure Generation Using Feedback From An Infrared Phase-Shifting Interferometer
H. Philip Stahl, Dean Ketelsen
Author Affiliations +
Abstract
An infrared phase-shifting interferometric system has been integrated with a novel optical figure generator at the University of Arizona Optical Sciences Center. This unique generator facility can produce generalized axially symmetric surface figures in a timely and cost-effective manner. The success of this facility depends on both its ability to efficiently remove material while forming the surface figure, and its ability to monitor the surface figure during the generation process to provide feedback to the optician. The facility has been used on several occasions to custom generate off-axis parabolic segements. Figures to within 0.30 μm rms of the desired figure have been obtained. This paper discusses the usefulness of the infrared phase-shifting interferometric system for providing figure correcting feedback to the optician during the generation of the off-axis parabolic segments and how it is affected by the surface roughness produced by each generator tool.
© (1986) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
H. Philip Stahl and Dean Ketelsen "Aspheric Figure Generation Using Feedback From An Infrared Phase-Shifting Interferometer", Proc. SPIE 0571, Large Optics Technology, (21 February 1986); https://doi.org/10.1117/12.950371
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KEYWORDS
Interferometers

Diamond

Phase shifts

Surface roughness

Interferometry

Infrared radiation

Surface finishing

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