PtSi Hexagonal Detector Focal Plane Arrays

B. R. Hanzal; J. D. Joseph; J. A. Cox; J. C. Schwanebeck

doi:10.1117/12.950332

11 December 1985 PtSi Hexagonal Detector Focal Plane Arrays

B. R. Hanzal, J. D. Joseph, J. A. Cox, J. C. Schwanebeck

Proceedings Volume 0570, Solid-State Imaging Arrays; (1985) https://doi.org/10.1117/12.950332
Event: 29th Annual Technical Symposium, 1985, San Diego, United States

Abstract

We demonstrate that it is straightforward to fabricate a mosaic array of hexagonal detectors within the framework of existing design rules and fabrication technology. As an example, we have fabricated an 8x8 array of hexagonal detectors with a very high fill factor using a PtSi technology. This is believed to be the first time that such an array has actually been fabricated. Design and fabrication highlights are discussed. A brief summary of performance advantages and algorithm implications that result from the use of the hexagonal configuration is given along with a possible system configuration. Plans for the design and testing of a 64x64 array of hexagonal detectors and corresponding readout chip are presented.

Citation Download Citation

B. R. Hanzal, J. D. Joseph, J. A. Cox, and J. C. Schwanebeck "PtSi Hexagonal Detector Focal Plane Arrays", Proc. SPIE 0570, Solid-State Imaging Arrays, (11 December 1985); https://doi.org/10.1117/12.950332

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