Structure design of Si-based M-Z interference acceleration seismic geophone

Bo Wu; Caihe Chen; Xiaoling Zhang; Yuming Cui; Guangpeng Ma; Yanjun Zhang; Juanjuan Zhong

doi:10.1117/12.573534

30 December 2004 Structure design of Si-based M-Z interference acceleration seismic geophone

Bo Wu, Caihe Chen, Xiaoling Zhang, Yuming Cui, Guangpeng Ma, Yanjun Zhang, Juanjuan Zhong

Proceedings Volume 5641, MEMS/MOEMS Technologies and Applications II; (2004) https://doi.org/10.1117/12.573534
Event: Photonics Asia, 2004, Beijing, China

Abstract

A novel Si-based MOEMS acceleration seismic geophone, based on M-Z interferometry, is present in this paper. In one silicon chip, several elements including four silicon beams,seismic mass, a polarizer, M-Z waveguide interferometer and acousto-optic phase modulator are integrated. The working principle and the optimization structure design of the acceleration seismic geophone are given. The simulation result performed in FEM software ANSYS agrees with the theoretical analysis well. The main design parameters of the geophone system is as following: resonance frequency: 1353 Hz; phase detection sensitivity ΔΦ/a: 1.2×10^-4rad/m/s².

Citation Download Citation

Bo Wu, Caihe Chen, Xiaoling Zhang, Yuming Cui, Guangpeng Ma, Yanjun Zhang, and Juanjuan Zhong "Structure design of Si-based M-Z interference acceleration seismic geophone", Proc. SPIE 5641, MEMS/MOEMS Technologies and Applications II, (30 December 2004); https://doi.org/10.1117/12.573534

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