The system on positioning detecting plasma fluorescence spectrum in reaction chamber

Zhenjiang He; Guanling Yang; Zuohua Huang; Linhai Huang; Xiaoju Gu

doi:10.1117/12.575749

10 February 2005 The system on positioning detecting plasma fluorescence spectrum in reaction chamber

Zhenjiang He, Guanling Yang, Zuohua Huang, Linhai Huang, Xiaoju Gu

Proceedings Volume 5638, Optical Design and Testing II; (2005) https://doi.org/10.1117/12.575749
Event: Photonics Asia, 2004, Beijing, China

Abstract

The real-time detection of plasma fluorescence spectrum in reaction chamber is significant for optimizing running parameters of the plasma syntonization enhanced system and finding sample reaction state. This paper present the new type detection system of fluorescence spectrum. This system applies a principle of control light beam transmitting by entrance pupil and viewing field, and rotated method of optical tube. It can monitor fluorescence spectrum of pointed position in reaction chamber. Some designed essentials about plan of detection range, position optical path and optical path of detecting plasma fluorescence spectrum in the system are introduced in detail. The system features are that it can aim at pointed positions of big luminophor and measure spectrum. It especially suit to real-time detect for plasma states in range nearly substrate holder. This system can applied in PECVD and some research as Chemiluminescence reaction chamber.

Citation Download Citation

Zhenjiang He, Guanling Yang, Zuohua Huang, Linhai Huang, and Xiaoju Gu "The system on positioning detecting plasma fluorescence spectrum in reaction chamber", Proc. SPIE 5638, Optical Design and Testing II, (10 February 2005); https://doi.org/10.1117/12.575749

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