Experimental research on thickness-monitoring techniques of non-quarter films

Xiaohui Zhang; Xiaodan Gao; Jionghui Rao

doi:10.1117/12.576190

10 February 2005 Experimental research on thickness-monitoring techniques of non-quarter films

Xiaohui Zhang, Xiaodan Gao, Jionghui Rao

Proceedings Volume 5638, Optical Design and Testing II; (2005) https://doi.org/10.1117/12.576190
Event: Photonics Asia, 2004, Beijing, China

Abstract

The precise control of the film thickness in the film deposition process is the key to depositing optical coating, it is difficult to get ideal film thickness by general turn-point value monitoring. The characteristics of four film thickness monitoring techniques, quartz crystal monitoring technique and common reflectance overshoot-turning point monitoring technique and turn-point monitoring technique with different monitoring wavelength at each layer and mutative overshoot-turning point monitoring technique, are analyzed in this thesis. The contrast experiments adopting the four monitoring techniques respectively to a non-quarter A.R. coating were made under the same technical condition. The experiment results have indicated that mutative overshoot-turning point monitoring technique can get more precise thickness control to non-quarter films than the other thickness monitoring techniques.

Citation Download Citation

Xiaohui Zhang, Xiaodan Gao, and Jionghui Rao "Experimental research on thickness-monitoring techniques of non-quarter films", Proc. SPIE 5638, Optical Design and Testing II, (10 February 2005); https://doi.org/10.1117/12.576190

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