Studies on phase Ronchi gratings and the fabrication of soft x-ray condenser zone plates

Ying Liu; Jun Lou; Kai Xiao; Xiangdong Xu; Yilin Hong; Shaojun Fu

doi:10.1117/12.574391

7 February 2005 Studies on phase Ronchi gratings and the fabrication of soft x-ray condenser zone plates

Ying Liu, Jun Lou, Kai Xiao, Xiangdong Xu, Yilin Hong, Shaojun Fu

Proceedings Volume 5636, Holography, Diffractive Optics, and Applications II; (2005) https://doi.org/10.1117/12.574391
Event: Photonics Asia, 2004, Beijing, China

Abstract

Ronchi gratings are widely used as beam splitters in interferometry. The phase Ronchi gratings are fabricated in K9 (or BK7) substrates using a photolithographic process and ion beam etching process. The geometry of the gratings was determined within the approximations of the scalar diffraction theory to minimize their diffraction intensities in 0 and 2 orders at 514.5nm. Their diffractive characteristics are measured using Ar+ laser at 514.5 and 496.5nm. The phase Ronchi gratings exhibit the diffraction intensity in 0 or 2 order to be three orders of magnitude less than that in 1 order. Soft x-ray condenser zone plates are one of the most essential condensing and dispersing elements in the field of soft x-ray microscopy. The zone-plates are used at 3.2nm, whose diameters are 2.8mm. The widths of their outermost zone are 647nm. The zone plate is made of Au. Self-supporting zone plates are fabricated by holography-ion beam etching process to obtain x-ray lithography mask, the x-ray lithography, photolithography and micro electroplating process were used to obtain their self-supporting structure. The self-supporting zone plates are free of membrane absorption and degradation.

Citation Download Citation

Ying Liu, Jun Lou, Kai Xiao, Xiangdong Xu, Yilin Hong, and Shaojun Fu "Studies on phase Ronchi gratings and the fabrication of soft x-ray condenser zone plates", Proc. SPIE 5636, Holography, Diffractive Optics, and Applications II, (7 February 2005); https://doi.org/10.1117/12.574391

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available