Laser-induced damage of single-crystalline silicon under different 1064-nm Nd:YAG laser modes

WeiDong Gao; Meiqiong Zhan; Janda Shao; Zhengxiu Fan

doi:10.1117/12.570313

26 January 2005 Laser-induced damage of single-crystalline silicon under different 1064-nm Nd:YAG laser modes

WeiDong Gao, Meiqiong Zhan, Janda Shao, Zhengxiu Fan

Proceedings Volume 5627, High-Power Lasers and Applications III; (2005) https://doi.org/10.1117/12.570313
Event: Photonics Asia, 2004, Beijing, China

Abstract

The Laser-induced damage behavior of single-Crystalline Silicon was investigated with a Nd:YAG laser at 1064nm under single-pulse mode and free-running mode. It was found that the damage behavior of the SCS showed strong dependence on the output mode of the incident laser. From the experimental and theoretical analysis, the damage mechanism under the two laser modes were given based on thermal and thermal-stress coupling models.

Citation Download Citation

WeiDong Gao, Meiqiong Zhan, Janda Shao, and Zhengxiu Fan "Laser-induced damage of single-crystalline silicon under different 1064-nm Nd:YAG laser modes", Proc. SPIE 5627, High-Power Lasers and Applications III, (26 January 2005); https://doi.org/10.1117/12.570313

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available