Study of dynamic response on a MOEMS 2x2 optical switch

Dongming Sun; Wei Dong; Wenbin Guo; Caixia Liu; Guodong Wang; Xin Yan; Baokun Xu; Weiyou Chen

doi:10.1117/12.570940

11 February 2005 Study of dynamic response on a MOEMS 2x2 optical switch

Dongming Sun, Wei Dong, Wenbin Guo, Caixia Liu, Guodong Wang, Xin Yan, Baokun Xu, Weiyou Chen

Proceedings Volume 5625, Optical Transmission, Switching, and Subsystems II; (2005) https://doi.org/10.1117/12.570940
Event: Asia-Pacific Optical Communications, 2004, Beijing, China

Abstract

The MOEMS 2×2 optical switch with slant lower electrode and with torsion beam on silicon is designed and analyzed theoretically. Analytical formulae for the squeeze film damping coefficient and the squeeze film damping moment on the cantilever beam of the optical switch are derived. Based on the torsion dynamics theory, the technique and relative results are presented for analyzing the actuating voltage and the switch time. The optimized result of parameters is as: length, width and thickness of the torsion beam are 700, 12 and 10 um, length and width of the cantilever beam are 1900 and 1000 um, length and width of the balance beam are 100 and 1000 um, shortest spacing between the upper and lower electrodes is 0.05 um, and highness of the lower electrode is 55 um, respectively. The actuating voltage is less than 10 V, and the switching time of Ton and Toff are 1.30ms and 1.25ms, respectively. The computed results show that the air squeeze film damping is an important factor for the study of dynamic response on MOEMS optical switch.

Citation Download Citation

Dongming Sun, Wei Dong, Wenbin Guo, Caixia Liu, Guodong Wang, Xin Yan, Baokun Xu, and Weiyou Chen "Study of dynamic response on a MOEMS 2x2 optical switch", Proc. SPIE 5625, Optical Transmission, Switching, and Subsystems II, (11 February 2005); https://doi.org/10.1117/12.570940

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KEYWORDS

Optical switching

Electrodes

Microopto electromechanical systems

Switching

Actuators

Switches

Silicon

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