Tunable stiffness scanning microscope probe

Clemens Mueller-Falcke; Yong-Ak Song; Sang-Gook Kim

doi:10.1117/12.571273

25 October 2004 Tunable stiffness scanning microscope probe

Clemens Mueller-Falcke, Yong-Ak Song, Sang-Gook Kim

Proceedings Volume 5604, Optomechatronic Micro/Nano Components, Devices, and Systems; (2004) https://doi.org/10.1117/12.571273
Event: Optics East, 2004, Philadelphia, Pennsylvania, United States

Abstract

Scanning probe microscopy (SPM) has been an important tool to image and manipulate micro/nano scale structures. The measurement is based on the optical detection of a very small deflection of a flexible cantilever while traveling near the sample surface. However, the use of a cantilever with a sharp oxidized conical tip is quite costly, very difficult to scale up and unable to scan variable hardness surfaces, such as cell membranes in vivo. A concept of in-plane probe tip is developed. It has a carbon nanotube tip, built-in actuator and a tip deflection sensor, all assembled in the same plane. Most of all, an in-plane probe design would enable the stiffness of the probe to become tunable by using MEMS clutched springs. This allows a continuous measurement of samples with inhomogeneous surface hardness without changing the probe in the middle of a measurement.

Citation Download Citation

Clemens Mueller-Falcke, Yong-Ak Song, and Sang-Gook Kim "Tunable stiffness scanning microscope probe", Proc. SPIE 5604, Optomechatronic Micro/Nano Components, Devices, and Systems, (25 October 2004); https://doi.org/10.1117/12.571273

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