Paper
8 December 2004 A three-dimensional waveguide structure as a support for genomic and proteomic microarrays
Stephan K. Dertinger, Marco Kluehr, Christian A. Elsner, Alexander Sauermann, Kristin Rueffer, Petra M. Nicklaus, Kerstin Thein
Author Affiliations +
Proceedings Volume 5591, Lab-on-a-Chip: Platforms, Devices, and Applications; (2004) https://doi.org/10.1117/12.578532
Event: Optics East, 2004, Philadelphia, Pennsylvania, United States
Abstract
In this paper we present a three-dimensional waveguide structure with unique optical and fluidic properties and demonstrate its application as a substrate for DNA microarrays. The structure is fabricated by thermal oxidation of a macroporous silicon membrane with a periodic pattern of discrete pores running perpendicular through the substrate. Partial oxidation generates a SiO2 membrane, but leaves a rectangular grid of silicon walls dividing the membrane into compartments. We show that the SiO2 walls act as optical waveguides and characterize their optical properties; modes can be launched using Koehler illumination. The silicon walls optically isolate adjacent compartments and prevent light from spreading laterally in the membrane. In a DNA hybridization experiment, the detection of 100 attomol of a Cy-3 labeled DNA fragment (17 oligonucleotides) has been achieved with a signal to noise ratio of > 3:1. We believe that even lower detection limits can be achieved by further tuning the optical parameters of the three-dimensional waveguide structure.
© (2004) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Stephan K. Dertinger, Marco Kluehr, Christian A. Elsner, Alexander Sauermann, Kristin Rueffer, Petra M. Nicklaus, and Kerstin Thein "A three-dimensional waveguide structure as a support for genomic and proteomic microarrays", Proc. SPIE 5591, Lab-on-a-Chip: Platforms, Devices, and Applications, (8 December 2004); https://doi.org/10.1117/12.578532
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KEYWORDS
Waveguides

Silicon

Photomicroscopy

Luminescence

Planar waveguides

Molecules

Optical properties

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