Measurement of Diamond-Turned Metal Surfaces by Light Scattering

Junji Ohtsubo

doi:10.1117/12.949577

25 October 1985 Measurement of Diamond-Turned Metal Surfaces by Light Scattering

Junji Ohtsubo

Proceedings Volume 0558, Inverse Optics II; (1985) https://doi.org/10.1117/12.949577
Event: 29th Annual Technical Symposium, 1985, San Diego, United States

Abstract

The roughness parameters of diamond-turned surfaces are obtained from the Fourier transform of scattered light intensity. Theoretical consideration of the scattered intensity and its Fourier transform is made. It is shown that the Fourier transform of the scattered intensity is equivalent to the autocorrelation of the surface. From this autocorrelation function, we can derive the amplitude and frequency of the periodic tool marks, and the rms roughness and correlation length of the random surface component. Some experimental results for diamond turned aluminum metal surfaces are also given. The comparison of the light scattering data and stylus measurement is made. It shows a qualitative agreement.

Citation Download Citation

Junji Ohtsubo "Measurement of Diamond-Turned Metal Surfaces by Light Scattering", Proc. SPIE 0558, Inverse Optics II, (25 October 1985); https://doi.org/10.1117/12.949577

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