Trends in gas sensors with tunable thin films

Lawrence Domash; Mitchell Cohen; Matthias Wagner

doi:10.1117/12.569051

21 October 2004 Trends in gas sensors with tunable thin films

Lawrence Domash, Mitchell Cohen, Matthias Wagner

Proceedings Volume 5563, Infrared Systems and Photoelectronic Technology; (2004) https://doi.org/10.1117/12.569051
Event: Optical Science and Technology, the SPIE 49th Annual Meeting, 2004, Denver, Colorado, United States

Abstract

A new family of miniature nano-tunable narrowband infrared filters has been developed based on the thermo-optic properties of thin film semiconductors. Originally developed for fiber optic telecommunications networks at 1.5 μm, the technology has now been extended to the 3-5 μm range, leading to very compact tunable filters with passbands on the order of 0.5% of center wavelength and tuning ranges up to 4% of center wavelength. Two applications are described. First, a prototype carbon monoxide sensor testbed based on a 4550-4650 nm tunable filter is shown to be capable of detecting less than 20 ppm of CO. Second, we show how nano-tunable thin film filters can be integrated with miniature blackbody sources to create a new family of ultra low cost integrated tunable IR emitters, which we have named Firefly. Packaged in TO cans, Firefly devices enable precision detection of gases including carbon dioxide, carbon monoxide, sulphur dioxide, hydrogen cyanide, water vapor, nitric oxide or methane.

Citation Download Citation

Lawrence Domash, Mitchell Cohen, and Matthias Wagner "Trends in gas sensors with tunable thin films", Proc. SPIE 5563, Infrared Systems and Photoelectronic Technology, (21 October 2004); https://doi.org/10.1117/12.569051

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