Optical-mechanical method for measurements in microtechnologies

Tamara V. Tulaikova; Svetlana Amirova; Hannes Bleuler; Philippe Renaud

doi:10.1117/12.557465

12 October 2004 Optical-mechanical method for measurements in microtechnologies

Tamara V. Tulaikova, Svetlana Amirova, Hannes Bleuler, Philippe Renaud

Proceedings Volume 5553, Advanced Wavefront Control: Methods, Devices, and Applications II; (2004) https://doi.org/10.1117/12.557465
Event: Optical Science and Technology, the SPIE 49th Annual Meeting, 2004, Denver, Colorado, United States

Abstract

A convenient method for exact recognitions of the curved shape and amplitudes of vibrated micro cantilevers is presented. The method includes the analysis based on preliminary introduction of the formulas for the shapes of deviated cantilevers to get the intensity distribution R(ξ) of the optical pattern of image. The feature of this method is the possibility to get high accuracy for MEMS orientation.

Citation Download Citation

Tamara V. Tulaikova, Svetlana Amirova, Hannes Bleuler, and Philippe Renaud "Optical-mechanical method for measurements in microtechnologies", Proc. SPIE 5553, Advanced Wavefront Control: Methods, Devices, and Applications II, (12 October 2004); https://doi.org/10.1117/12.557465

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