Genetic algorithm optimization of x-ray multilayer coatings

Pietro D. Binda; Fabio E. Zocchi

doi:10.1117/12.568104

21 October 2004 Genetic algorithm optimization of x-ray multilayer coatings

Pietro D. Binda, Fabio E. Zocchi

Proceedings Volume 5536, Advances in Computational Methods for X-Ray and Neutron Optics; (2004) https://doi.org/10.1117/12.568104
Event: Optical Science and Technology, the SPIE 49th Annual Meeting, 2004, Denver, Colorado, United States

Abstract

A simple genetic algorithm for global optimisation of the reflectivity of multilayer coatings in the extreme ultra-violet and X-ray wavelength ranges has been implemented as a software tool. The genetic algorithm identifies the best-performing multilayer among a population of solutions that evolves while random mutations are applied to the thickness of the layers. The tool is designed for maximising the reflectivity either over a wavelength range at fixed incident angle or over a range of incident directions at fixed energy. The algorithm has been preliminarily tested on two specific applications: a Pt/C multilayer for hard X-rays applications in astrophysics and cosmology and a Mo/Si coating prominent to next generation lithography at 13.5 nm. The results of the analyses are compared to the performances achievable with periodic multilayers and traditional supermirrors.

Citation Download Citation

Pietro D. Binda and Fabio E. Zocchi "Genetic algorithm optimization of x-ray multilayer coatings", Proc. SPIE 5536, Advances in Computational Methods for X-Ray and Neutron Optics, (21 October 2004); https://doi.org/10.1117/12.568104

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