Effect of silicon anisotropy on mirror substrate design

Yaming Li; Ali M. Khounsary

doi:10.1117/12.561438

18 October 2004 Effect of silicon anisotropy on mirror substrate design

Yaming Li, Ali M. Khounsary

Proceedings Volume 5533, Advances in Mirror Technology for X-Ray, EUV Lithography, Laser, and Other Applications II; (2004) https://doi.org/10.1117/12.561438
Event: Optical Science and Technology, the SPIE 49th Annual Meeting, 2004, Denver, Colorado, United States

Abstract

Single-crystal silicon is one of the substrate materials often used for x-ray optical components, such as mirrors and monochromators. Silicon crystal is elastically anisotropic, mechanical properties are direction dependent. Because anisotropic analysis is complicated, isotropic approximation is commonly used in the design of optical substrates. This approximation is satisfactory in most cases. However, a full anisotropic analysis is required to precisely characterize the performance of optical substrates or determine the effect of anisotropy. In this paper, single-crystal-silicon anisotropy and its effects on deformation of bendable optics are discussed. The resulting anticlastic bending is described, and a complete numerical solution as well as approximate analytical formulations, is provided. Anisotropy can be used advantageously to accentuate anticlastic bending.

Citation Download Citation

Yaming Li and Ali M. Khounsary "Effect of silicon anisotropy on mirror substrate design", Proc. SPIE 5533, Advances in Mirror Technology for X-Ray, EUV Lithography, Laser, and Other Applications II, (18 October 2004); https://doi.org/10.1117/12.561438

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