Microwave discharge on external surface of quartz plate

Valery M. Shibkov; Vladimir A. Chernikov; Sergey A. Dvinin; Alexey P. Ershov; Andrey A. Karachev; Lidia V. Shibkova; Oleg S. Surkont; Anatoliy V. Voskanyan

doi:10.1117/12.556992

28 May 2004 Microwave discharge on external surface of quartz plate

Valery M. Shibkov, Vladimir A. Chernikov, Sergey A. Dvinin, Alexey P. Ershov, Andrey A. Karachev, Lidia V. Shibkova, Oleg S. Surkont, Anatoliy V. Voskanyan

Author Affiliations +

Proceedings Volume 5401, Micro- and Nanoelectronics 2003; (2004) https://doi.org/10.1117/12.556992
Event: Micro- and Nanoelectronics 2003, 2003, Zvenigorod, Russian Federation

Abstract

A new way of creation of the stable and constantly reproduced at various experiments surface microwave discharge near a flat dielectric antenna was developed and experimentally investigated at a wide range of air pressure p=10^-3 ÷10³ torr. The breakdown characteristics determining a threshold of a surface microwave discharge appearance were studied. Longitudinal size and velocity of spreading of a surface microwave discharge in air were determined at a wide range of gas pressure, microwave power and pulse duration. The spatial-temporary evolution of electron density, gas and vibrational temperatures were investigated. It is shown that the surface microwave discharge can be used as a plasma source for microelectronics and material processing.

Citation Download Citation

Valery M. Shibkov, Vladimir A. Chernikov, Sergey A. Dvinin, Alexey P. Ershov, Andrey A. Karachev, Lidia V. Shibkova, Oleg S. Surkont, and Anatoliy V. Voskanyan "Microwave discharge on external surface of quartz plate", Proc. SPIE 5401, Micro- and Nanoelectronics 2003, (28 May 2004); https://doi.org/10.1117/12.556992

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