Linear electrostatic micromotors for nano- and micro-positioning

I. L. Baginsky; Edvard G. Kostsov

doi:10.1117/12.562732

28 May 2004 Linear electrostatic micromotors for nano- and micro-positioning

I. L. Baginsky, Edvard G. Kostsov

Proceedings Volume 5401, Micro- and Nanoelectronics 2003; (2004) https://doi.org/10.1117/12.562732
Event: Micro- and Nanoelectronics 2003, 2003, Zvenigorod, Russian Federation

Abstract

The functioning of the linear step electrostatic film micromotors with the short controlling pulse (less then 100-200 µs) is studied to create nano- and micro-positioners. The theoretical study of the step movement of the given mass in this time frame is carried out. The results of the experimental studies of the multipetal reciprocal micromotors created on the basis of La modified Ba_0.5Sr_0.5Nb₂O₆ ferroelectric films with 1-3 μm thickness are shown. The petals were made of beryllium bronze. It is shown that the electrostatic rolling can last less than 50 μs, and the process of separating two surfaces (the metal and the ferroelectric) can last less than 1 μs. These parameters allow one to operate the micromotor at 1-10 kHz frequency, and the propulsion force in the beginning (the first 20-100 μs) of the electrostatic rolling can be as high as 1-10 N per 1 mm² of the rolling surface with the voltage pulse amplitude of 40-50 V. The possibility of obtaining moving plate (MP) step in the nanometer range is studied, as well as the precision of these steps during the continuous MP movement with the different clock frequencies and durations of the voltage pulses. The recommendations are given to improve the accuracy and the speed of the positioning in the nano- and micro-movement range. Possible fields of micromotor application are micromechanics, including precision micromechanics, microelectronics, microrobots, microoptics, microscanners, micropumps (e.g. in the jet printers), micro flying vehicles etc.

Citation Download Citation

I. L. Baginsky and Edvard G. Kostsov "Linear electrostatic micromotors for nano- and micro-positioning", Proc. SPIE 5401, Micro- and Nanoelectronics 2003, (28 May 2004); https://doi.org/10.1117/12.562732

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