Holographic imaging technique for characterization of MEMS switch dynamics

Vytautas Ostasevicius; Arvydas Palevicius; Antanas Daugela; Minvydas Ragulskis; Ramutis Palevicius

doi:10.1117/12.540183

29 July 2004 Holographic imaging technique for characterization of MEMS switch dynamics

Vytautas Ostasevicius, Arvydas Palevicius, Antanas Daugela, Minvydas Ragulskis, Ramutis Palevicius

Proceedings Volume 5389, Smart Structures and Materials 2004: Smart Electronics, MEMS, BioMEMS, and Nanotechnology; (2004) https://doi.org/10.1117/12.540183
Event: Smart Structures and Materials, 2004, San Diego, CA, United States

Abstract

An innovative holographic imaging technique is applied in characterization of MEMS switch non-linear dynamics. The Duffing's non-linear oscillator based phenomenological model was adopted to study MEMS switch non-linear response due to the complicated contact phenomena and corresponding boundary conditions. An experimental contact measurement result of MEMS cantilever response that matches theoretical trends is provided. Non-destructive contact measurements were performed by means of quantitative nanomechnical test instruments. Non-contact holographic characterization method yielded results comparable with phenomenological model and contact measurements. The proposed holographic characterization method consists of digitized holographic measurements enhanced by the FEM eigenvector problem solution. Two cases were analyzed for simple and perturbated sinusoidal excitations that correspond to the free and contact boundary conditions, respectively.

Citation Download Citation

Vytautas Ostasevicius, Arvydas Palevicius, Antanas Daugela, Minvydas Ragulskis, and Ramutis Palevicius "Holographic imaging technique for characterization of MEMS switch dynamics", Proc. SPIE 5389, Smart Structures and Materials 2004: Smart Electronics, MEMS, BioMEMS, and Nanotechnology, (29 July 2004); https://doi.org/10.1117/12.540183

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