Random aberration and local flare

Masato Shibuya; Hiromi Ezaki; Toshihumi Fukui; Nobuaki Watanabe; Akira Nishikata

doi:10.1117/12.533979

28 May 2004 Random aberration and local flare

Masato Shibuya, Hiromi Ezaki, Toshihumi Fukui, Nobuaki Watanabe, Akira Nishikata

Proceedings Volume 5377, Optical Microlithography XVII; (2004) https://doi.org/10.1117/12.533979
Event: Microlithography 2004, 2004, Santa Clara, California, United States

Abstract

Recently, in optical lithography, extremely small wavefront aberration has been required and the fine undulation of wave aberration has been aggressively discussed. Since CD(pattern width) variation of image depends on the local Cr density of mask, it has been regarded that the fine undulation of wavefront aberration scatters or diffracts light and causes local flare. However we think that the physical origin of local flare and the definition of fine undulation are not so clear. In this paper, we categorize wavefront aberration into figure aberration and random aberration. Therefore the concept of random aberration is useful to not only understand the local flare but also evaluate the fine undulation of wavefront aberration.

Citation Download Citation

Masato Shibuya, Hiromi Ezaki, Toshihumi Fukui, Nobuaki Watanabe, and Akira Nishikata "Random aberration and local flare", Proc. SPIE 5377, Optical Microlithography XVII, (28 May 2004); https://doi.org/10.1117/12.533979

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available