Evaluation of 157-nm resist structure: outgassing relationship using in situ QCM technique

Masamitsu Shirai; Toyofumi Shinozuka; Shinichi Takashiba; Yusuke Horiguchi; Shigeo Irie; Toshiro Itani

doi:10.1117/12.533649

14 May 2004 Evaluation of 157-nm resist structure: outgassing relationship using in situ QCM technique

Masamitsu Shirai, Toyofumi Shinozuka, Shinichi Takashiba, Yusuke Horiguchi, Shigeo Irie, Toshiro Itani

Proceedings Volume 5376, Advances in Resist Technology and Processing XXI; (2004) https://doi.org/10.1117/12.533649
Event: Microlithography 2004, 2004, Santa Clara, California, United States

Abstract

An in-situ quartz crystal microbalance (QCM) method was applied to quantitatively measure the outgassing from 157-nm resists, i.e., fluorinated cyclopolymer (FCP) and its derivatives blocked with alkoxymethyl ether units, in real time. The frequency change of quartz crystal coated with resist films was monitored during exposure and the mass desorbed from the resist films was calculated as amounts of outgassing. The sensitivity of the present QCM system was about 1 ng. The outgassing rate from FCP was much lower than FCP blocked with alkoxymethyl ether moiety, suggesting that the outgassing was mainly caused from the blocking units. Acidic components in outgassing were quantitatively measured by in-situ QCM technique using the quartz crystal coated with poly(4-vinylpyridine) (PVP) or a copolymer (DMEST) of 2-(dimethylamino)ethyl methacrylate and styrene. The acidic materials adsorbed on quart crystal were monitored during exposure and the mass adsorbed was calculated. The amount of acidic compounds in outgassing was dependent on fluorine content of the resist polymers.

Citation Download Citation

Masamitsu Shirai, Toyofumi Shinozuka, Shinichi Takashiba, Yusuke Horiguchi, Shigeo Irie, and Toshiro Itani "Evaluation of 157-nm resist structure: outgassing relationship using in situ QCM technique", Proc. SPIE 5376, Advances in Resist Technology and Processing XXI, (14 May 2004); https://doi.org/10.1117/12.533649

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