Paper
9 July 2004 Photonic crystal channel waveguides in InP
Thomas F. Krauss, M. V. Kotlyar, L. O'Faolain, R. Wilson, Michael Settle, Timothy J. Karle
Author Affiliations +
Abstract
We have fabricated high-quality planar photonic crystal defect waveguides in InP/InGaAsP material. Using Fourier analysis of the Fabry-Perot fringes obtained in transmission, we derive the propagation losses. Values as small as 1.8 dB/mm for waveguides consisting of 3 rows of missing holes ("W3") were measured. To the best of our knowledge, this is the smallest loss in III-V semiconductor photonic crystal waveguides reported to date. We believe that the reduction in losses is due to the high quality of etching carried out using a new regime of chemically assisted ion beam etching.
© (2004) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Thomas F. Krauss, M. V. Kotlyar, L. O'Faolain, R. Wilson, Michael Settle, and Timothy J. Karle "Photonic crystal channel waveguides in InP", Proc. SPIE 5360, Photonic Crystal Materials and Devices II, (9 July 2004); https://doi.org/10.1117/12.538485
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KEYWORDS
Etching

Waveguides

Photonic crystals

Wave propagation

Channel waveguides

Fourier transforms

Reactive ion etching

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