Fabrication of micro-optical components by using a femtosecond laser

Jianrong Qiu; Kiyotaka Miura; Kazuyuki Hirao

doi:10.1117/12.537372

14 June 2004 Fabrication of micro-optical components by using a femtosecond laser

Jianrong Qiu, Kiyotaka Miura, Kazuyuki Hirao

Proceedings Volume 5350, Optical Components and Materials; (2004) https://doi.org/10.1117/12.537372
Event: Integrated Optoelectronic Devices 2004, 2004, San Jose, CA, United States

Abstract

Femtosecond laser has been widely used in materials micro-processing when high accuracy and small structure size are required. When a transparent material like glass is irradiated by a tightly focused femtosecond laser, the photoinduced reaction is expected to occur only near the focused part of the laser beam due to the multiphoton processes. We observed various induced structures e.g. color center defects, refractive index change, micro-void and micro-crack, in glasses after the femtosecond laser irradiation. Here, we demonstrate the fabrication of various micro-optical components, e.g. optical waveguide, microgating, microlens, fiber attenuator, 3-dimensional optical memory by using the femtosecond laser-induced structures. The femtosecond laser direct writing technique is very promising in the fabrication of micro-optical components with various optical functions.

Citation Download Citation

Jianrong Qiu, Kiyotaka Miura, and Kazuyuki Hirao "Fabrication of micro-optical components by using a femtosecond laser", Proc. SPIE 5350, Optical Components and Materials, (14 June 2004); https://doi.org/10.1117/12.537372

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available