Thermal mechanisms of laser micromachining of indium tin oxide

David A. Willis

doi:10.1117/12.529830

15 July 2004 Thermal mechanisms of laser micromachining of indium tin oxide

David A. Willis

Proceedings Volume 5339, Photon Processing in Microelectronics and Photonics III; (2004) https://doi.org/10.1117/12.529830
Event: Lasers and Applications in Science and Engineering, 2004, San Jose, Ca, United States

Abstract

A critical review of pulsed laser micromachining of Indium Tin Oxide (ITO) films on glass substrates is presented. The thermal mechanisms responsible for ITO micromachining are discussed, including the roles of melting, thermo-capillary flow of molten ITO, and vaporization. The importance of flexible displays now motivates research of ITO on flexible polymer substrates. Experimental results of Nd:YAG micromachining of ITO on PET substrates are presented. The results show distinct differences from the case of glass substrates. Ablated sections have complete ITO removal with little damage to the PET substrate. The edges of the ablated sections have no melt ridge build-up as seen on glass substrates. Results are interpreted in terms of the thermal and mechanical properties of the film and substrate.

Citation Download Citation

David A. Willis "Thermal mechanisms of laser micromachining of indium tin oxide", Proc. SPIE 5339, Photon Processing in Microelectronics and Photonics III, (15 July 2004); https://doi.org/10.1117/12.529830

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