Application of lasers in precise measurements of microelements

Romuald Jozwicki; Malgorzata Kujawinska; Krzysztof Patorski

doi:10.1117/12.520760

6 October 2003 Application of lasers in precise measurements of microelements

Romuald Jozwicki, Malgorzata Kujawinska, Krzysztof Patorski

Proceedings Volume 5229, Laser Technology VII: Applications of Lasers; (2003) https://doi.org/10.1117/12.520760
Event: Laser Technology VII: Applications of Lasers, 2002, Szczecin, Poland

Abstract

Effective and reliable manufacturing of Micro (Opto) Electro Mechanical Systems (MEMS and MOEMS) requires extensive measurements of their mechanical and material parameters including shape, displacements, deformation, vibration mode profiles and material constants. Knowledge of these parameters at various technological and product life stages is of fundamental importance for MEMS and MOEMS design process. Complex structures are subject to wide range mechanical, thermal and electric loads and their testing methods should provide data about their behavior with nanometer sensitivity and spatial micrometer resolution. In the paper numerous examples of MEMS and MOEMS testing by laser interferometric methods are presented. The methods include classical heterodyne and grating interferometry, interferometric tomography, digital holographic and speckle interferometry. The studies presented were conducted in Optical Engineering Division, Institute of Micromechanics and Photonics of Warsaw University of Technology.

Citation Download Citation

Romuald Jozwicki, Malgorzata Kujawinska, and Krzysztof Patorski "Application of lasers in precise measurements of microelements", Proc. SPIE 5229, Laser Technology VII: Applications of Lasers, (6 October 2003); https://doi.org/10.1117/12.520760

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