Enhancement of laser/EUV conversion by shaped laser pulse interacting with Li-contained targets for EUV lithography

Alexander A. Andreev; Jiri Limpouch; N. B. Voznesensky; Alexander P. Zhevlakov; Vladimir E. Yashin

doi:10.1117/12.512456

7 January 2004 Enhancement of laser/EUV conversion by shaped laser pulse interacting with Li-contained targets for EUV lithography

Alexander A. Andreev, Jiri Limpouch, N. B. Voznesensky, Alexander P. Zhevlakov, Vladimir E. Yashin

Author Affiliations +

Proceedings Volume 5196, Laser-Generated and Other Laboratory X-Ray and EUV Sources, Optics, and Applications; (2004) https://doi.org/10.1117/12.512456
Event: Optical Science and Technology, SPIE's 48th Annual Meeting, 2003, San Diego, California, United States

Abstract

The advantages of droplet and claster Li-contained targets for debris free EUV generation are estimated on base of analytical modeling and simulation. Conversion efficiency of laser energy into EUV energy from such targets is found to reach a few percents. The laser prepulse is proposed to enhance the laser energy conversion into emission at wavelength of 13.5 nm.

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Alexander A. Andreev, Jiri Limpouch, N. B. Voznesensky, Alexander P. Zhevlakov, and Vladimir E. Yashin "Enhancement of laser/EUV conversion by shaped laser pulse interacting with Li-contained targets for EUV lithography", Proc. SPIE 5196, Laser-Generated and Other Laboratory X-Ray and EUV Sources, Optics, and Applications, (7 January 2004); https://doi.org/10.1117/12.512456

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