High-performance Cr/Sc multilayers for the soft x-ray range

Sergiy A. Yulin; Franz Schaefers; Torsten Feigl; Norbert Kaiser

doi:10.1117/12.505688

13 January 2004 High-performance Cr/Sc multilayers for the soft x-ray range

Sergiy A. Yulin, Franz Schaefers, Torsten Feigl, Norbert Kaiser

Proceedings Volume 5193, Advances in Mirror Technology for X-Ray, EUV Lithography, Laser, and Other Applications; (2004) https://doi.org/10.1117/12.505688
Event: Optical Science and Technology, SPIE's 48th Annual Meeting, 2003, San Diego, California, United States

Abstract

Results of soft x-ray reflection measurements of Cr/Sc multilayer mirrors close to the Sc absorption edge at 3.11 nm are presented. Improvements in the deposition technology and the adjustment of the multilayer period with an accuracy of better than 0.01 nm to this absorption edge enabled a step forward towards soft x-ray mirrors with an adequate reflectance that allow the realization of normal incidence optical components in the water window. In particular, reflectivity measurements performed at the PTB reflectometer at BESSY II in Berlin revealed a reflectivity of R = 14.8% at an incidence angle of θ = 1.5° and R = 15.0% at θ = 5°. Simulation results show that the interface widths between the Cr and Sc nanolayers are less than 0.4 nm. The annealing effect in short-period Cr/Sc multilayers was studied in the temperature range from 50°C to 500°C by X-ray scattering and transmission electron microscopy. Structural and phase transformations and the corresponding changes of the optical properties are presented and discussed.

Citation Download Citation

Sergiy A. Yulin, Franz Schaefers, Torsten Feigl, and Norbert Kaiser "High-performance Cr/Sc multilayers for the soft x-ray range", Proc. SPIE 5193, Advances in Mirror Technology for X-Ray, EUV Lithography, Laser, and Other Applications, (13 January 2004); https://doi.org/10.1117/12.505688

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