Device for calibration of the height micrometers and the squareness standards

Tae Bong Eom

doi:10.1117/12.505412

20 November 2003 Device for calibration of the height micrometers and the squareness standards

Tae Bong Eom

Proceedings Volume 5190, Recent Developments in Traceable Dimensional Measurements II; (2003) https://doi.org/10.1117/12.505412
Event: Optical Science and Technology, SPIE's 48th Annual Meeting, 2003, San Diego, California, United States

Abstract

To calibrate a squareness standard and a height micrometer, the Korea Research Institute of Standards and Science (KRISS) has built a new linear measuring machine moving vertically. The main requirement on design of the machine is to achieve the flexibility to calibrate several kinds of standards such as square master, cylindrical square, height micrometer and linear height gauge which are positioned vertically on the surface plate. The system consists of a precision granite column with an air bearing state, a laser interferometer and two electronic probes. In order to calibrate the squareness standards, the granite beam is used as a reference of squareness and a guide of vertical movement. The instrument incorporates a frequency stabilized He-Ne laser. The vertical movement is measured by a laser interferometer whose operation is based on the heterodyne measurement technique. Positioning for calibrating the height micrometer is undertaken by using a vertical stage and a horizontal stage, and its measurement is performed by combining the laser interferometer reading and the electronic probe readings. The paper gives a description of the system and a preliminary measurement results.

Citation Download Citation

Tae Bong Eom "Device for calibration of the height micrometers and the squareness standards", Proc. SPIE 5190, Recent Developments in Traceable Dimensional Measurements II, (20 November 2003); https://doi.org/10.1117/12.505412

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KEYWORDS

Calibration

Interferometers

Mirrors

Sensors

Standards development

Heterodyning

Motion measurement

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