5-m measurement system for traceable measurements of tapes and rules

Tanfer Yandayan; Bulent Ozgur

doi:10.1117/12.505579

20 November 2003 5-m measurement system for traceable measurements of tapes and rules

Tanfer Yandayan, Bulent Ozgur

Proceedings Volume 5190, Recent Developments in Traceable Dimensional Measurements II; (2003) https://doi.org/10.1117/12.505579
Event: Optical Science and Technology, SPIE's 48th Annual Meeting, 2003, San Diego, California, United States

Abstract

Measurement uncertainty is an important topic for traceable measurements. Nevertheless not many literatures on the uncertainty of flatness measurements have been reported. In this paper, we report on this issue according to the Guide to the Expression fo Uncertainty in Measurements (GUM). First stability of the reference optical flat used in Fizeau interferometer is discussed analytically, numerically, and experimentally. Then other uncertainty sources in actual measurements are investigated. As a result the uncertainty of flatness measurement of a large aperture flatness interferometer made by National Metrology Institute of Japan is 1/77 wavelength.

Citation Download Citation

Tanfer Yandayan and Bulent Ozgur "5-m measurement system for traceable measurements of tapes and rules", Proc. SPIE 5190, Recent Developments in Traceable Dimensional Measurements II, (20 November 2003); https://doi.org/10.1117/12.505579

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