Replication technology for micro-optics and optical microsystems

Michael T. Gale

doi:10.1117/12.507666

10 November 2003 Replication technology for micro-optics and optical microsystems

Michael T. Gale

Proceedings Volume 5177, Gradient Index, Miniature, and Diffractive Optical Systems III; (2003) https://doi.org/10.1117/12.507666
Event: Optical Science and Technology, SPIE's 48th Annual Meeting, 2003, San Diego, California, United States

Abstract

Replication technology is playing an increasingly important role in the production of micro-optical elements and systems. Hot embossing, injection moulding and uv-embossing all can produce high quality optical elements in very cost-effective processes. The development of wafer scale replication technology using uv-curable sol-gel and polymer materials enables refractive and diffractive micro-optical elements to be replicated directly onto glass substrates or onto Si or III-V device wafers. New sol-gel materials allow the combination of replication with lithography to leave selected areas material-free for sawing and bonding. The technology is suitable for the production of both planar micro-optical elements and stacked optical microsystems. Replication techniques are inherently of very high resolution, so that optical nanostructures such as subwavelength structures can also be produced by the same technologies. Grating nanostructures with linewidths less than 100 nm have been replicated into polymer and sol-gel materials for the cost-effective fabrication of large area subwavelength structures for applications such as anti-reflection surfaces, polarisers and certain types of resonant filters.

Citation Download Citation

Michael T. Gale "Replication technology for micro-optics and optical microsystems", Proc. SPIE 5177, Gradient Index, Miniature, and Diffractive Optical Systems III, (10 November 2003); https://doi.org/10.1117/12.507666

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